Consider the following functions: 1. To mask against diffusion

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Consider the following functions:
1. To mask against diffusion or ion implant.
2. To act as a component in MOS devices.
3. To provide low resistivity paths.
4. To facilitate the entry of dopants.
The functions of an oxide layer on a silicon wager would include:

1. 1 and 2
2. 2 and 3
3. 3 and 4
4. 1 and 4

Correct Option: A

NA